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㡮 ǡ ݵü Һ ü ű ȫ ä ΰ(AI)ݵü ȫ پ α ڵ鿡Ե ȹ̴.
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е ꡤС ǥ Ǹ, 300 ǥ ̴.
÷ EUV Lithography оߴ Z ο(Fellow) ֽ (SK)̴н λ ݵü ٽɱ (ALD) оߴ 뽺 ijѶ̳(North Carolina) G. Parsons Ŀ ݵü оߴ ָ(Arizona) R. Nemanich ǥѴ.
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(۷ι) ݵü ° ȭ ȴ.
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